Paper Title:
Numerical Studies of Polycrystalline Silicon Film Growth
  Abstract

  Info
Periodical
Solid State Phenomena (Volume 93)
Edited by
T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner
Pages
405-410
DOI
10.4028/www.scientific.net/SSP.93.405
Citation
Y. Kobayashi, K. Satake, "Numerical Studies of Polycrystalline Silicon Film Growth ", Solid State Phenomena, Vol. 93, pp. 405-410, 2003
Online since
June 2003
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Price
$32.00
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