Paper Title:
Fabrication and Characterization of Ultra-Small Polycrystalline Silicon Islands for Advanced Multi-Level Silicon-On-Insulator Applications
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Periodical
Solid State Phenomena (Volume 93)
Edited by
T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner
Pages
441-446
DOI
10.4028/www.scientific.net/SSP.93.441
Citation
D. Schmidt, P. Pianetta, "Fabrication and Characterization of Ultra-Small Polycrystalline Silicon Islands for Advanced Multi-Level Silicon-On-Insulator Applications ", Solid State Phenomena, Vol. 93, pp. 441-446, 2003
Online since
June 2003
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