Defect Control Process Technologies for High-Performance Polycrystalline Si Thin-Film Transistor Fabrication |
| Journal |
Solid State Phenomena (Volume 93) |
| Volume |
Polycrystalline Semiconductors VII |
| Edited by |
T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner |
| Pages |
49-54 |
| DOI |
10.4028/www.scientific.net/SSP.93.49 |
| Citation |
Seiichiro Higashi et al., 2003, Solid State Phenomena, 93, 49 |
| Authors |
Seiichiro Higashi, Daisuke Abe, Yasushi Hiroshima, Kazuyuki Miyashita, Takahiro Kawamura, Satoshi Inoue, Tatsuya Shimoda |
| Keywords |
Defect Passivation, Electron Cyclotron Resonance, Laser Annealing, Polycrystalline Silicon, Thin Film Transistor |
| Full Paper |
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