Paper Title:
Defect Control Process Technologies for High-Performance Polycrystalline Si Thin-Film Transistor Fabrication
  Abstract

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Periodical
Solid State Phenomena (Volume 93)
Edited by
T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner
Pages
49-54
DOI
10.4028/www.scientific.net/SSP.93.49
Citation
S. Higashi, D. Abe, Y. Hiroshima, K. Miyashita, T. Kawamura, S. Inoue, T. Shimoda, "Defect Control Process Technologies for High-Performance Polycrystalline Si Thin-Film Transistor Fabrication", Solid State Phenomena, Vol. 93, pp. 49-54, 2003
Online since
June 2003
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Price
$32.00
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