High Quality Polycrystalline Silicon Thin Film Transistors Fabricated from Laser-Irradiated Sputtered Si Films |
| Journal |
Solid State Phenomena (Volume 93) |
| Volume |
Polycrystalline Semiconductors VII |
| Edited by |
T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner |
| Pages |
61-66 |
| DOI |
10.4028/www.scientific.net/SSP.93.61 |
| Citation |
Tadashi Serikawa, 2003, Solid State Phenomena, 93, 61 |
| Authors |
Tadashi Serikawa |
| Keywords |
Ar-Laser Crystallization, Furnace-Hydrogenation, Polycrystalline Silicon, Sputter Deposition, Thin Film Transistor |
| Full Paper |
Get the full paper by clicking here
|
