High Quality Polycrystalline Silicon Thin Film Transistors Fabricated from Laser-Irradiated Sputtered Si Films |
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| Journal | Solid State Phenomena (Volume 93) |
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| Volume | Polycrystalline Semiconductors VII |
| Edited by | T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner |
| Pages | 61-66 |
| DOI | 10.4028/www.scientific.net/SSP.93.61 |
| Authors | Tadashi Serikawa |
| Keywords | Ar-Laser Crystallization, Furnace-Hydrogenation, Polycrystalline Silicon, Sputter Deposition, Thin Film Transistor |
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