Paper Title:
Smart-Cut Process for Ultrathin SOI Wafers Manufacturing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
1-10
DOI
10.4028/www.scientific.net/SSP.95-96.1
Citation
C. Maleville, "Smart-Cut Process for Ultrathin SOI Wafers Manufacturing", Solid State Phenomena, Vols. 95-96, pp. 1-10, 2004
Online since
September 2003
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Price
$32.00
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