Paper Title:
Processing and Characterization of 300 mm Argon-Annealed Wafers
  Abstract

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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
105-110
DOI
10.4028/www.scientific.net/SSP.95-96.105
Citation
T. Müller, E. Daub, H. Yokota, R. Wahlich, P. Krottenthaler, W. von Ammon, "Processing and Characterization of 300 mm Argon-Annealed Wafers", Solid State Phenomena, Vols. 95-96, pp. 105-110, 2004
Online since
September 2003
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