Paper Title:

Nitrogen Out-Diffusion from Czochralski Silicon Monitored by Depth Profiles of Shallow Thermal Donors

Periodical Solid State Phenomena (Volumes 95 - 96)
Main Theme Gettering and Defect Engineering in Semiconductor Technology X
Edited by H. Richter and M. Kittler
Pages 117-122
DOI 10.4028/www.scientific.net/SSP.95-96.117
Citation Vladimir V. Voronkov et al., 2003, Solid State Phenomena, 95-96, 117
Online since September, 2003
Authors Vladimir V. Voronkov, A.V. Batunina, G.I. Voronkova, Robert J. Falster
Keywords Nitrogen, Out-Diffusion, Oxygen, Silicon, Thermal Donor
Price US$ 28,-
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