Paper Title:
Nitrogen Out-Diffusion from Czochralski Silicon Monitored by Depth Profiles of Shallow Thermal Donors
| Periodical |
Solid State Phenomena (Volumes 95 - 96)
|
| Main Theme |
Gettering and Defect Engineering in Semiconductor Technology X
|
| Edited by |
H. Richter and M. Kittler |
| Pages |
117-122 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.117 |
| Citation |
Vladimir V. Voronkov et al., 2003, Solid State Phenomena, 95-96, 117 |
| Online since |
September, 2003 |
| Authors |
Vladimir V. Voronkov, A.V. Batunina, G.I. Voronkova, Robert J. Falster |
| Keywords |
Nitrogen, Out-Diffusion, Oxygen, Silicon, Thermal Donor |
| Price |
US$ 28,- |