Paper Title:
Nitrogen Out-Diffusion from Czochralski Silicon Monitored by Depth Profiles of Shallow Thermal Donors
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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
117-122
DOI
10.4028/www.scientific.net/SSP.95-96.117
Citation
V. V. Voronkov, A.V. Batunina, G.I. Voronkova, R. J. Falster, "Nitrogen Out-Diffusion from Czochralski Silicon Monitored by Depth Profiles of Shallow Thermal Donors ", Solid State Phenomena, Vols. 95-96, pp. 117-122, 2004
Online since
September 2003
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