Paper Title:
Depth Resolved Defect Analysis by Micro-Raman Investigations of Plasma Hydrogenated Czochralski Silicon Wafers
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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
141-148
DOI
10.4028/www.scientific.net/SSP.95-96.141
Citation
R. Job, Y. Ma, Y. L. Huang, A. G. Ulyashin, W. R. Fahrner, M. F. Beaufort, J. F. Barbot, "Depth Resolved Defect Analysis by Micro-Raman Investigations of Plasma Hydrogenated Czochralski Silicon Wafers", Solid State Phenomena, Vols. 95-96, pp. 141-148, 2004
Online since
September 2003
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