Paper Title:
Evaluation of Silicon Sheet Film Growth and Wafer Processing via Structural, Chemical and Electrical Diagnostics
  Abstract

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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
211-216
DOI
10.4028/www.scientific.net/SSP.95-96.211
Citation
G. A. Rozgonyi, J. Lu, R. Zhang, J. Rand, R. Jonczyk, "Evaluation of Silicon Sheet Film Growth and Wafer Processing via Structural, Chemical and Electrical Diagnostics", Solid State Phenomena, Vols. 95-96, pp. 211-216, 2004
Online since
September 2003
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Price
$32.00
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