Influence of High-Temperature Processes on Multicrystalline Silicon |
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| Journal | Solid State Phenomena (Volumes 95 - 96) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by | H. Richter and M. Kittler |
| Pages | 235-242 |
| DOI | 10.4028/www.scientific.net/SSP.95-96.235 |
| Citation | Oliver Schultz et al., 2003, Solid State Phenomena, 95-96, 235 |
| Authors | Oliver Schultz, Stephan Riepe, Stephan W. Glunz |
| Keywords | Gettering, Minority Carrier Lifetime, Multicrystalline Silicon |
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