Paper Title:
Influence of High-Temperature Processes on Multicrystalline Silicon
| Periodical |
Solid State Phenomena (Volumes 95 - 96)
|
| Main Theme |
Gettering and Defect Engineering in Semiconductor Technology X
|
| Edited by |
H. Richter and M. Kittler |
| Pages |
235-242 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.235 |
| Citation |
Oliver Schultz et al., 2003, Solid State Phenomena, 95-96, 235 |
| Online since |
September, 2003 |
| Authors |
Oliver Schultz, Stephan Riepe, Stephan W. Glunz |
| Keywords |
Gettering, Minority Carrier Lifetime, Multicrystalline Silicon |
| Price |
US$ 28,- |