Paper Title:

Influence of High-Temperature Processes on Multicrystalline Silicon

Periodical Solid State Phenomena (Volumes 95 - 96)
Main Theme Gettering and Defect Engineering in Semiconductor Technology X
Edited by H. Richter and M. Kittler
Pages 235-242
DOI 10.4028/www.scientific.net/SSP.95-96.235
Citation Oliver Schultz et al., 2003, Solid State Phenomena, 95-96, 235
Online since September, 2003
Authors Oliver Schultz, Stephan Riepe, Stephan W. Glunz
Keywords Gettering, Minority Carrier Lifetime, Multicrystalline Silicon
Price US$ 28,-
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