Paper Title:
Growth of Si1-x-yGexCy Alloy Layers on Si by Chemical Vapor Deposition Using Ethylene
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
243-248
DOI
10.4028/www.scientific.net/SSP.95-96.243
Citation
Y. D. Zheng, N. Jiang, P. Han, S. L. Gu, S. M. Zhu, R. L. Jiang, Y. Shi, W. F. Lu, B. Shen, R. Zhang, "Growth of Si1-x-yGexCy Alloy Layers on Si by Chemical Vapor Deposition Using Ethylene", Solid State Phenomena, Vols. 95-96, pp. 243-248, 2004
Online since
September 2003
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