Extended Defects in Silicon: an Old and New Story |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
263-272 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.263 |
| Citation |
Jan Vanhellemont et al., 2003, Solid State Phenomena, 95-96, 263 |
| Authors |
Jan Vanhellemont, Olivier De Gryse, Paul Clauws |
| Keywords |
Dislocations, Film Stresses, Local Oxidation, Oxygen Precipitation, Process, Silicon |
| Full Paper |
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