Luminescence of Dislocations and Oxide Precipitates in Si |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
273-282 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.273 |
| Citation |
Sergio Pizzini et al., 2003, Solid State Phenomena, 95-96, 273 |
| Authors |
Sergio Pizzini, E. Leoni, Simona Binetti, Maurizio Acciarri, Alessia Le Donne, Bernard Pichaud |
| Keywords |
Dislocations, Luminescence, Oxygen, Plastic Deformation, Silicon |
| Full Paper |
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