Luminescence of Silicon Implanted with Phosphorus |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
289-296 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.289 |
| Citation |
Tzanimir Arguirov et al., 2003, Solid State Phenomena, 95-96, 289 |
| Authors |
Tzanimir Arguirov, Martin Kittler, Winfried Seifert, D. Bolze, K.-E. Ehwald, Peter Formanek, Jürgen Reif |
| Keywords |
Crystal Defects, Phosphorus Implantation, Photoluminescence (PL), Silicon |
| Full Paper |
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