Laser Crystallization of Thin a-Si Films on Plastic Substrates Using Excimer Laser Treatments |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
29-34 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.29 |
| Citation |
M.D. Efremov et al., 2003, Solid State Phenomena, 95-96, 29 |
| Authors |
M.D. Efremov, Vladimir A. Volodin, Liudmila I. Fedina, Anton K. Gutakovskii, D.V. Marin, S.A. Kochubei, A.A. Popov, Yu. A. Minakov, V.N. Ulasyuk |
| Keywords |
Flexible Substrate, Nanocrystal, Pulsed Laser Annealing, Raman Spectroscopy, Silicon |
| Full Paper |
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