Properties of Cavities Induced by Helium Implantation in Silicon and their Applications to Devices |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
297-306 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.297 |
| Citation |
Frédéric Cayrel et al., 2003, Solid State Phenomena, 95-96, 297 |
| Authors |
Frédéric Cayrel, Daniel Alquier, Laurent Ventura, Leo Vincent, F. Roqueta, Christiane Dubois, Robert Jérisian |
| Keywords |
Device, Extended Defects, Gettering, Helium Implantation, Silicon |
| Full Paper |
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