Paper Title:
Modification of MeV He Implantation-Induced Cavities in Silicon by Hydrogen Plasma Treatment
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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
307-312
DOI
10.4028/www.scientific.net/SSP.95-96.307
Citation
C.L. Liu, E. Ntsoenzok, M. F. Barthe, P. Desgardin, S. Ashok, A. Vengurlekar, D. Alquier, M.O. Ruault, "Modification of MeV He Implantation-Induced Cavities in Silicon by Hydrogen Plasma Treatment", Solid State Phenomena, Vols. 95-96, pp. 307-312, 2004
Online since
September 2003
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