Paper Title:

Modification of MeV He Implantation-Induced Cavities in Silicon by Hydrogen Plasma Treatment

Periodical Solid State Phenomena (Volumes 95 - 96)
Main Theme Gettering and Defect Engineering in Semiconductor Technology X
Edited by H. Richter and M. Kittler
Pages 307-312
DOI 10.4028/www.scientific.net/SSP.95-96.307
Citation C.L. Liu et al., 2003, Solid State Phenomena, 95-96, 307
Online since September, 2003
Authors C.L. Liu, E. Ntsoenzok, Marie France Barthe, P. Desgardin, S. Ashok, A. Vengurlekar, Daniel Alquier, M.O. Ruault
Keywords He-Cavities, Hydrogen Plasma Treatment, MeV He Ion Implantation, Silicon, XTEM
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