Paper Title:
Modification of MeV He Implantation-Induced Cavities in Silicon by Hydrogen Plasma Treatment
| Periodical |
Solid State Phenomena (Volumes 95 - 96)
|
| Main Theme |
Gettering and Defect Engineering in Semiconductor Technology X
|
| Edited by |
H. Richter and M. Kittler |
| Pages |
307-312 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.307 |
| Citation |
C.L. Liu et al., 2003, Solid State Phenomena, 95-96, 307 |
| Online since |
September, 2003 |
| Authors |
C.L. Liu, E. Ntsoenzok, Marie France Barthe, P. Desgardin, S. Ashok, A. Vengurlekar, Daniel Alquier, M.O. Ruault |
| Keywords |
He-Cavities, Hydrogen Plasma Treatment, MeV He Ion Implantation, Silicon, XTEM |
| Price |
US$ 28,- |