Effect of External Stress at Annealing on Microstructure of Silicon Co-Implanted with Hydrogen and Helium |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
313-318 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.313 |
| Citation |
Andrzej Misiuk et al., 2003, Solid State Phenomena, 95-96, 313 |
| Authors |
Andrzej Misiuk, Adam Barcz, Jacek Ratajczak, Jadwiga Bak-Misiuk |
| Keywords |
Co-Implantation, Cz-Si:H, Gettering, He, Hydrostatic Pressure, Microstructure |
| Full Paper |
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