Paper Title:
Effect of External Stress at Annealing on Microstructure of Silicon Co-Implanted with Hydrogen and Helium
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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
313-318
DOI
10.4028/www.scientific.net/SSP.95-96.313
Citation
A. Misiuk, A. Barcz, J. Ratajczak, J. Bak-Misiuk, "Effect of External Stress at Annealing on Microstructure of Silicon Co-Implanted with Hydrogen and Helium", Solid State Phenomena, Vols. 95-96, pp. 313-318, 2004
Online since
September 2003
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