Paper Title:

Defects Created by Multi-Energy He Implantation of Silicon at High Temperatures

Periodical Solid State Phenomena (Volumes 95 - 96)
Main Theme Gettering and Defect Engineering in Semiconductor Technology X
Edited by H. Richter and M. Kittler
Pages 319-324
DOI 10.4028/www.scientific.net/SSP.95-96.319
Citation Marie-Laure David et al., 2003, Solid State Phenomena, 95-96, 319
Online since September, 2003
Authors Marie-Laure David, Marie France Beaufort, Jean François Barbot
Keywords Cavities, Helium, Implantation, Silicon, TEM
Price US$ 28,-
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