Paper Title:
Defects Created by Multi-Energy He Implantation of Silicon at High Temperatures
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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
319-324
DOI
10.4028/www.scientific.net/SSP.95-96.319
Citation
M.-L. David, M. F. Beaufort, J. F. Barbot, "Defects Created by Multi-Energy He Implantation of Silicon at High Temperatures", Solid State Phenomena, Vols. 95-96, pp. 319-324, 2004
Online since
September 2003
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