Defects Created by Multi-Energy He Implantation of Silicon at High Temperatures |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
319-324 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.319 |
| Citation |
Marie-Laure David et al., 2003, Solid State Phenomena, 95-96, 319 |
| Authors |
Marie-Laure David, Marie France Beaufort, Jean François Barbot |
| Keywords |
Cavities, Helium, Implantation, Silicon, TEM |
| Full Paper |
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