Paper Title:
Doping Effect of Helium Induced Nanocavities in Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
325-330
DOI
10.4028/www.scientific.net/SSP.95-96.325
Citation
F. Cayrel, L. Ventura, D. Alquier, F. Roqueta, R. Jérisian, "Doping Effect of Helium Induced Nanocavities in Silicon", Solid State Phenomena, Vols. 95-96, pp. 325-330, 2004
Online since
September 2003
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Price
$32.00
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