Paper Title:
Effects of Self-Ion Implantation on the Thermal Growth of He-Induced Cavities in Silicon
  Abstract

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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
337-342
DOI
10.4028/www.scientific.net/SSP.95-96.337
Citation
C.L. Liu, D. Alquier, F. Cayrel, E. Ntsoenzok, M.O. Ruault, "Effects of Self-Ion Implantation on the Thermal Growth of He-Induced Cavities in Silicon", Solid State Phenomena, Vols. 95-96, pp. 337-342, 2004
Online since
September 2003
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