Paper Title:
Computer Modelling of SiO2 Precipitation in Cz-Si Doped with Nitrogen
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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
405-414
DOI
10.4028/www.scientific.net/SSP.95-96.405
Citation
A.A. Efremov, V.G. Litovchenko, A.V. Sarikov, H. Richter, V.D. Akhmetov, "Computer Modelling of SiO2 Precipitation in Cz-Si Doped with Nitrogen", Solid State Phenomena, Vols. 95-96, pp. 405-414, 2004
Online since
September 2003
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