Dislocation Locking in Silicon by Oxygen and Oxygen Transport at Low Temperatures |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
43-52 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.43 |
| Citation |
Semih Senkader et al., 2003, Solid State Phenomena, 95-96, 43 |
| Authors |
Semih Senkader, A. Giannattasio, Robert J. Falster, Peter R. Wilshaw |
| Keywords |
Czochralski, Diffusivity, Dislocations, Oxygen, Silicon, Warpage |
| Full Paper |
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