Paper Title:

Dislocation Generation in Device Fabrication Process

Periodical Solid State Phenomena (Volumes 95 - 96)
Main Theme Gettering and Defect Engineering in Semiconductor Technology X
Edited by H. Richter and M. Kittler
Pages 439-446
DOI 10.4028/www.scientific.net/SSP.95-96.439
Citation Isabella Mica et al., 2003, Solid State Phenomena, 95-96, 439
Online since September, 2003
Authors Isabella Mica, Maria Luisa Polignano, G.P. Carnevale, Aldo Armigliato, R. Balboni, M. Brambilla, F. Cazzaniga, Giuseppe Pavia, V. Soncini
Keywords CBED Analysis, Crystal Defects, Implantation Damage, Mechanical Stress
Price US$ 28,-
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