Paper Title:
Dislocation Generation in Device Fabrication Process
| Periodical |
Solid State Phenomena (Volumes 95 - 96)
|
| Main Theme |
Gettering and Defect Engineering in Semiconductor Technology X
|
| Edited by |
H. Richter and M. Kittler |
| Pages |
439-446 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.439 |
| Citation |
Isabella Mica et al., 2003, Solid State Phenomena, 95-96, 439 |
| Online since |
September, 2003 |
| Authors |
Isabella Mica, Maria Luisa Polignano, G.P. Carnevale, Aldo Armigliato, R. Balboni, M. Brambilla, F. Cazzaniga, Giuseppe Pavia, V. Soncini |
| Keywords |
CBED Analysis, Crystal Defects, Implantation Damage, Mechanical Stress |
| Price |
US$ 28,- |