Paper Title:
Dislocation Generation in Device Fabrication Process
  Abstract

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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
439-446
DOI
10.4028/www.scientific.net/SSP.95-96.439
Citation
I. Mica, M. L. Polignano, G.P. Carnevale, A. Armigliato, R. Balboni, M. Brambilla, F. Cazzaniga, G. Pavia, V. Soncini, "Dislocation Generation in Device Fabrication Process ", Solid State Phenomena, Vols. 95-96, pp. 439-446, 2004
Online since
September 2003
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