Paper Title:
Precise Measurement of Ge Depth Profiles in SiGe HBT's - a Comparison of Different Methods
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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
473-482
DOI
10.4028/www.scientific.net/SSP.95-96.473
Citation
P. Zaumseil, D. Krüger, R. Kurps, O.V. Fursenko, P. Formanek, "Precise Measurement of Ge Depth Profiles in SiGe HBT's - a Comparison of Different Methods", Solid State Phenomena, Vols. 95-96, pp. 473-482, 2004
Online since
September 2003
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