Paper Title:
Measurement of Nitrogen Concentration in Cz Silicon Crystals
  Abstract

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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
489-494
DOI
10.4028/www.scientific.net/SSP.95-96.489
Citation
N. Inoue, A. Hashimoto, K. Shingu, K. Masumoto, "Measurement of Nitrogen Concentration in Cz Silicon Crystals", Solid State Phenomena, Vols. 95-96, pp. 489-494, 2004
Online since
September 2003
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