Paper Title:
Residual Stress Distribution and Silicon Phase Transformation Induced by Rockwell Indentation at Different Temperatures, Studied by Means of Micro-Raman Spectroscopy
| Periodical |
Solid State Phenomena (Volumes 95 - 96)
|
| Main Theme |
Gettering and Defect Engineering in Semiconductor Technology X
|
| Edited by |
H. Richter and M. Kittler |
| Pages |
513-518 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.513 |
| Citation |
Simona Kouteva-Arguirova et al., 2003, Solid State Phenomena, 95-96, 513 |
| Online since |
September, 2003 |
| Authors |
Simona Kouteva-Arguirova, Valeri I. Orlov, Winfried Seifert, Jürgen Reif, Hans Richter |
| Keywords |
Indentation, Raman Spectroscopy, Silicon, Stress Distribution |
| Price |
US$ 28,- |