Paper Title:

Residual Stress Distribution and Silicon Phase Transformation Induced by Rockwell Indentation at Different Temperatures, Studied by Means of Micro-Raman Spectroscopy

Periodical Solid State Phenomena (Volumes 95 - 96)
Main Theme Gettering and Defect Engineering in Semiconductor Technology X
Edited by H. Richter and M. Kittler
Pages 513-518
DOI 10.4028/www.scientific.net/SSP.95-96.513
Citation Simona Kouteva-Arguirova et al., 2003, Solid State Phenomena, 95-96, 513
Online since September, 2003
Authors Simona Kouteva-Arguirova, Valeri I. Orlov, Winfried Seifert, Jürgen Reif, Hans Richter
Keywords Indentation, Raman Spectroscopy, Silicon, Stress Distribution
Price US$ 28,-
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