Paper Title:
Phosphorus Diffusion Gettering of Metallic Impurities in Silicon: Mechanisms beyond Segregation
  Abstract

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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
527-538
DOI
10.4028/www.scientific.net/SSP.95-96.527
Citation
W. Schröter, A. Döller, A. Zozime, V. V. Kveder, M. Seibt, E. Spiecker, "Phosphorus Diffusion Gettering of Metallic Impurities in Silicon: Mechanisms beyond Segregation", Solid State Phenomena, Vols. 95-96, pp. 527-538, 2004
Online since
September 2003
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