Effect of Electron Irradiation on Thermal Donors in Oxygen-Doped High-Resistivity FZ Si |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
53-58 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.53 |
| Citation |
K. Takakura et al., 2003, Solid State Phenomena, 95-96, 53 |
| Authors |
K. Takakura, H. Ohyama, T. Yoshida, Hidekazu Murakawa, J.M. Rafí, Reinhart Job, Alexander G. Ulyashin, Eddy Simoen, C. Claeys |
| Keywords |
Electron Irradiation, FZ-Si, Radiation Damage, Thermal Donor |
| Full Paper |
Get the full paper by clicking here
|
