Paper Title:

Effect of Electron Irradiation on Thermal Donors in Oxygen-Doped High-Resistivity FZ Si

Periodical Solid State Phenomena (Volumes 95 - 96)
Main Theme Gettering and Defect Engineering in Semiconductor Technology X
Edited by H. Richter and M. Kittler
Pages 53-58
DOI 10.4028/www.scientific.net/SSP.95-96.53
Citation K. Takakura et al., 2003, Solid State Phenomena, 95-96, 53
Online since September, 2003
Authors K. Takakura, H. Ohyama, T. Yoshida, Hidekazu Murakawa, J.M. Rafí, Reinhart Job, Alexander G. Ulyashin, Eddy Simoen, C. Claeys
Keywords Electron Irradiation, FZ-Si, Radiation Damage, Thermal Donor
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