Paper Title:
Gettering Strategies for SOI Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
547-552
DOI
10.4028/www.scientific.net/SSP.95-96.547
Citation
A. A. Istratov, W. Huber, E. R. Weber, "Gettering Strategies for SOI Wafers", Solid State Phenomena, Vols. 95-96, pp. 547-552, 2004
Online since
September 2003
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Price
$32.00
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