Gettering Strategies for SOI Wafers |
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| Journal | Solid State Phenomena (Volumes 95 - 96) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by | H. Richter and M. Kittler |
| Pages | 547-552 |
| DOI | 10.4028/www.scientific.net/SSP.95-96.547 |
| Citation | Andrei A. Istratov et al., 2003, Solid State Phenomena, 95-96, 547 |
| Authors | Andrei A. Istratov, W. Huber, Eicke R. Weber |
| Keywords | Gettering, Iron, Poly-Silicon, Silicon Dioxide, SOI |
| Full Paper | 
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