Paper Title:
Controlled Gettering of Implanted Platinum in Silicon Produced by Helium Co-Implantation
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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
559-564
DOI
10.4028/www.scientific.net/SSP.95-96.559
Citation
P. Hazdra, J. Vobecký, "Controlled Gettering of Implanted Platinum in Silicon Produced by Helium Co-Implantation", Solid State Phenomena, Vols. 95-96, pp. 559-564, 2004
Online since
September 2003
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