Paper Title:
Gettering of Impurities in Hydrogen Implanted Nitrogen-Doped Silicon
  Abstract

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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
565-570
DOI
10.4028/www.scientific.net/SSP.95-96.565
Citation
I.V. Antonova, A. Misiuk, A. Barcz, D. S. Yang, V.P. Popov, "Gettering of Impurities in Hydrogen Implanted Nitrogen-Doped Silicon", Solid State Phenomena, Vols. 95-96, pp. 565-570, 2004
Online since
September 2003
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