Paper Title:
Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency
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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
581-586
DOI
10.4028/www.scientific.net/SSP.95-96.581
Citation
H. Väinölä, P. Zhang, A. Haarahiltunen, A. A. Istratov, E. R. Weber, "Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency", Solid State Phenomena, Vols. 95-96, pp. 581-586, 2004
Online since
September 2003
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