Paper Title:
Ion Beam Induced Excess Vacancies in Si and SiGe and Related Cu Gettering
  Abstract

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Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
587-592
DOI
10.4028/www.scientific.net/SSP.95-96.587
Citation
R. Kögler, A. Peeva, A. Kuznetsov, J.S. Christensen, B. G. Svensson, W. Skorupa, "Ion Beam Induced Excess Vacancies in Si and SiGe and Related Cu Gettering", Solid State Phenomena, Vols. 95-96, pp. 587-592, 2004
Online since
September 2003
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