Paper Title:
Atomically Controlled Technology for Future Si-Based Devices
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
607-616
DOI
10.4028/www.scientific.net/SSP.95-96.607
Citation
J. Murota, M. Sakuraba, B. Tillack, "Atomically Controlled Technology for Future Si-Based Devices", Solid State Phenomena, Vols. 95-96, pp. 607-616, 2004
Online since
September 2003
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