Self-Assembled Surface Patterning and Structural Modification upon Femtosecond Laser Processing of Crystalline Silicon |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
635-640 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.635 |
| Citation |
Florenta Costache et al., 2003, Solid State Phenomena, 95-96, 635 |
| Authors |
Florenta Costache, Simona Kouteva-Arguirova, Jürgen Reif |
| Keywords |
Crystalline Phase, Femtosecond Laser Processing, Raman Spectroscopy, Self-Assembly of Nanostructures, Silicon, Time-of-Flight Mass Spectroscopy |
| Full Paper |
Get the full paper by clicking here
|
