Simulation of Oxygen Contaminated Silicon Grain Boundaries in Cluster Approximation |
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| Journal | Solid State Phenomena (Volumes 95 - 96) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by | H. Richter and M. Kittler |
| Pages | 65-70 |
| DOI | 10.4028/www.scientific.net/SSP.95-96.65 |
| Citation | Alex L. Pushkarchuk et al., 2003, Solid State Phenomena, 95-96, 65 |
| Authors | Alex L. Pushkarchuk, A.K. Fedotov, S.A. Kuten |
| Keywords | Gettering, Grain Boundary, Oxygen, Silicon |
| Full Paper | 
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