Surface Tension Variation of Silicon Melts with Nitrogen Addition |
| Journal |
Solid State Phenomena (Volumes 95 - 96) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by |
H. Richter and M. Kittler |
| Pages |
659-664 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.659 |
| Citation |
Kazutaka Terashima et al., 2003, Solid State Phenomena, 95-96, 659 |
| Authors |
Kazutaka Terashima, Mitsuyoshi Sakairi, Muneyuki Hirai, Tomohisa Tsuchiya |
| Keywords |
Nitrogen Additions, Property Variation, Silicon Melt, Surface Tension |
| Full Paper |
Get the full paper by clicking here
|
