Paper Title:
Oxygen Ion Bombardment for Local Oxide Formation in Si
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 95-96)
Edited by
H. Richter and M. Kittler
Pages
77-82
DOI
10.4028/www.scientific.net/SSP.95-96.77
Citation
D. Krüger, R. Kurps, P. Formanek, G. Weidner, "Oxygen Ion Bombardment for Local Oxide Formation in Si", Solid State Phenomena, Vols. 95-96, pp. 77-82, 2004
Online since
September 2003
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