Nitrogen Diffusion and Interaction with Oxygen in Si |
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| Journal | Solid State Phenomena (Volumes 95 - 96) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by | H. Richter and M. Kittler |
| Pages | 83-92 |
| DOI | 10.4028/www.scientific.net/SSP.95-96.83 |
| Citation | Vladimir V. Voronkov et al., 2003, Solid State Phenomena, 95-96, 83 |
| Authors | Vladimir V. Voronkov, Robert J. Falster |
| Keywords | Diffusion, Dissociation, Nitrogen, Oxygen, Silicon |
| Full Paper | 
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