Paper Title:

Nitrogen Diffusion and Interaction with Oxygen in Si

Periodical Solid State Phenomena (Volumes 95 - 96)
Main Theme Gettering and Defect Engineering in Semiconductor Technology X
Edited by H. Richter and M. Kittler
Pages 83-92
DOI 10.4028/www.scientific.net/SSP.95-96.83
Citation Vladimir V. Voronkov et al., 2003, Solid State Phenomena, 95-96, 83
Online since September, 2003
Authors Vladimir V. Voronkov, Robert J. Falster
Keywords Diffusion, Dissociation, Nitrogen, Oxygen, Silicon
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