Paper Title:
Nitrogen Diffusion and Interaction with Oxygen in Si
| Periodical |
Solid State Phenomena (Volumes 95 - 96)
|
| Main Theme |
Gettering and Defect Engineering in Semiconductor Technology X
|
| Edited by |
H. Richter and M. Kittler |
| Pages |
83-92 |
| DOI |
10.4028/www.scientific.net/SSP.95-96.83 |
| Citation |
Vladimir V. Voronkov et al., 2003, Solid State Phenomena, 95-96, 83 |
| Online since |
September, 2003 |
| Authors |
Vladimir V. Voronkov, Robert J. Falster |
| Keywords |
Diffusion, Dissociation, Nitrogen, Oxygen, Silicon |
| Price |
US$ 28,- |