Structure and Electronic Properties of Nitrogen Defects in Silicon |
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| Journal | Solid State Phenomena (Volumes 95 - 96) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology X |
| Edited by | H. Richter and M. Kittler |
| Pages | 93-98 |
| DOI | 10.4028/www.scientific.net/SSP.95-96.93 |
| Citation | R. Jones et al., 2003, Solid State Phenomena, 95-96, 93 |
| Authors | R. Jones, I. Hahn, Jonathan P. Goss, Patrick R. Briddon, Sven Öberg |
| Keywords | Nitrogen, Silicon |
| Full Paper |
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