Characterization of Nucleation Sites in Nitrogen Doped Czochralski Silicon by Density Functional Theory and Molecular Mechanics

Sueoka, Koji; Rozgonyi, George A.; Karoui, A.; Hourai, M.; Sahtout Karoui, F.

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Periodical	Solid State Phenomena (Volumes 95 - 96)
Main Theme	Gettering and Defect Engineering in Semiconductor Technology X
Edited by	H. Richter and M. Kittler
Pages	99-104
DOI	10.4028/www.scientific.net/SSP.95-96.99
Citation	F. Sahtout Karoui et al., 2003, Solid State Phenomena, 95-96, 99
Online since	September, 2003
Authors	F. Sahtout Karoui, A. Karoui, George A. Rozgonyi, M. Hourai, Koji Sueoka
Keywords	Ab Initio, Atomic Structure, Barrier, CZ Si, Density Function Theory (DFT), Formation Energy, FZ Si, Molecular Mechanics, N₂, Nitrogen Doped Silicon, NO Complex, Potential Well, Stability, V₂N₂, VN₂, V-N-O
Price	US$ 28,-

Paper Titles

Characterization of Nucleation Sites in Nitrogen Doped Czochralski Silicon by Density Functional Theory and Molecular Mechanics