Paper Title:
Basic Self-Formation Processes in the Technologies of the Integrated Circuits
  Abstract

The analysis for basic processes of self-formation microstructure in technologies of manufacturing semiconductor devices and integrated circuits (IC) have been made and the requirements have been formulated. The results of the implementation of self-formation processes for creating new technologies of manufacturing semiconductor devices and IC have been presented.

  Info
Periodical
Solid State Phenomena (Volumes 97-98)
Edited by
Stepas Janušonis
Pages
229-234
DOI
10.4028/www.scientific.net/SSP.97-98.229
Citation
R. Navickas, R. Kirvaitis, "Basic Self-Formation Processes in the Technologies of the Integrated Circuits", Solid State Phenomena, Vols. 97-98, pp. 229-234, 2004
Online since
April 2004
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Price
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