Paper Title:
Microstructural Characterisation of RF Magnetron Sputtered ZnO Thin Films on SiC
  Abstract

The microstructural characterization of r.f. magnetron sputtered ZnO thin films deposited on 6H-SiC is presented with a comprehensive investigation of their properties as a function of annealing temperature and film thickness. These structures, with some modifications, are utilised as Schottky diode hydrogen gas sensors and Surface Acoustic Wave (SAW) devices.

  Info
Periodical
Solid State Phenomena (Volumes 99-100)
Edited by
Witold Lojkowski and John R. Blizzard
Pages
123-126
DOI
10.4028/www.scientific.net/SSP.99-100.123
Citation
A. Trinchi, W. Wlodarski, S. Santucci, D. Di Claudio, M. Passacantando, C. Cantalini, B. Rout, S.J. Ippolito, K. Kalantar-Zadeh, G. Sberveglieri, "Microstructural Characterisation of RF Magnetron Sputtered ZnO Thin Films on SiC", Solid State Phenomena, Vols. 99-100, pp. 123-126, 2004
Online since
July 2004
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