Silicon Dioxide

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Papers by keyword «Silicon Dioxide»

Surface Morphology Improvement of SiC Epitaxy by Sacrificial Oxidation
Authors: C.J. Anthony, A.J. Pidduck, Michael J. Uren
Keywords: Atomic Force Microscopy, Epitaxy, RCA Clean, Sacrificial Oxidation, Silicon Dioxide, Surface Defects, UV Ozone
High Resolution Photoemission Study of the 6H-SiC/SiO₂ Interface
Authors: B. Mattern, M. Bassler, Gerhard Pensl, Lothar Ley
Keywords: Interface Composition, Photoelectron Spectroscopy, Silicon Dioxide, Valence-Band Offset
Comparison of SiO₂ and AIN as Gate Dielectric for SiC MOS Structures
Authors: C.M. Zetterling, Mikael Östling, Chris I. Harris, Nils Nordell, K. Wongchotigul, Michael G. Spencer
Keywords: Aluminium Nitride, Metal Organic Chemical Vapour Deposition, Silicon Dioxide, Thermal Oxidation
Photoemission Study of the Silicate Adlayer Reconstruction on Si-terminated 6H-SiC (0001)
Authors: N. Sieber, M. Hollering, Jürgen Ristein, Lothar Ley
Keywords: Photoelectron Spectroscopy, Silicate Adlayer, Silicon Dioxide, Surface States
A Probe of Chemical Oxide Growth Conditions
Authors: Larry W. Shive, Claire Frey, Carissima Vitus
Keywords: Photo-Thermal Reflection Spectroscopy, Silicon Dioxide, Stress
Chemical Mechanical Polishing (CMP) in Magnetic Float Polishing (MFP) of Advanced Ceramic (Silicon Nitride) and Glass (Silicon Dioxide)
Authors: M. Jiang, R. Komanduri
Keywords: Chemical Mechanical Polishing (CMP), High Speed Bearing, Magnetic Float Polishing MFP, Silicon Dioxide, Silicon Nitride (Si₃N₄)
Correlation between Deposition Rate and Hardness of Remote PECVD Silicon Oxide Films
Authors: Ch. Bayer, Ph. Rudolf von Rohr
Keywords: Deposition Rate, Hardness, Modelling, PECVD, Silicon Dioxide
Visible/Infra-Red Absorption Study in Fiber Geometry of Metastable Defect States in High-Purity Fused Silicas
Authors: D.L. Griscom
Keywords: Color Centers, Optical Fibre, Radiation Damage, Silicon Dioxide
Laser-Induced Luminescence in Glassy SiO₂ and Neutron-Irradiated Alpha-Quartz: Three Types of Non-Bridging Oxygen Hole Centers
Authors: L. Skuja, A. Naber
Keywords: Amorphization, Luminescence, Neutron Irradiation, Quartz, Silicon Dioxide, Vibronic Lines
Theory of Impurity Interactions in Silicon Dioxide
Authors: W. Beall Fowler, Arthur H. Edwards
Keywords: Defect, Oxidation, Silicon, Silicon Dioxide, Theory

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