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Silicon and Recrystallization

Papers by keyword «Silicon» and «Recrystallization» Defects Below Mask Edges in Silicon Induced by Amorphizing Implantations Authors: Hans Cerva Keywords: Arsenic, BF2+, Crystal Defect, Dislocation, Implantation, Mask Edge, Phosphorus, Recrystallization, Secondary Defects, Silicon, Transmission Electron Microscopy (TEM), ULSI, VLSI Amorphisation and Recrystallisation of Nanometre Sized Zones in Silicon Authors: P.D. Edmondson, S.E. Donnelly, R.C. Birtcher Keywords: Amorphous Zones, Annealing, Ion Irradiation, Recrystallization, Silicon, Transmission Electron Microscopy (TEM)

Next 10 Keywords SiC (854 entries) Texture (843 entries) Residual Stress (827 entries) Hydroxyapatite (HA) (810 entries) X-Ray Diffraction (XRD) (804 entries) Thin Film (720 entries) Finite Element Method (FEM) (713 entries) Diffusion (702 entries) Transmission Electron Microscopy (TEM) (671 entries) Al Alloy (632 entries)

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