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Silicon and Texture
Papers by keyword «Silicon» and «Texture»
Mechanisms Controlling Preferred Orientation of Chemical Vapour Deposited Polycrystalline Films
Authors:
Yuya Kajikawa, Suguru Noda, Hiroshi Komiyama
Keywords:
Chemical Vapor Deposition (CVD), Preferred Orientation, SiC, Silicon, Texture
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SiC
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Total: 1 page; 1 paper
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