Papers by keyword «Silicon» and «Transmission Electron Microscopy (TEM)»
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EBIC and Cathodoluminescence Study of the Bonded Silicon Wafers
Authors: Kenichi Ikeda, Takashi Sekiguchi, Syouko Ito, Masashi Suezawa
Keywords: CL, EBIC, Silicon, Transmission Electron Microscopy (TEM), Wafer Bonding
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Si/Si Interface Bonded at Room Temperature by Ar Beam Surface Activation
Authors: H. Takagi, Ryutaro Maeda, N. Hosoda, Tadatomo Suga
Keywords: Ar Beam Etching, Room Temperature Bonding, Silicon, Transmission Electron Microscopy (TEM), Wafer Bonding
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Embedded Lead Inclusions in Aluminium, Aluminium-Silicon Eutectic Alloys and Silicon
Authors: S. Hagège, L. Haas, P. Ochin, A. Dezellus, Ph. Plaindoux, J.C. Rouchaud
Keywords: Al, Equilibrium Morphology, Interfacial Energy, Melt Spinning, Monotectic Alloys, Pb, Silicon, Transmission Electron Microscopy (TEM), Twin
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Electron Irradiation Effects in Silicon Thin Foils Under Ultra-High Vacuum Environment
Authors: S. Takeda, K. Koto, Masako Hirata, T. Kuno, S. Iijima, T. Ichihashi
Keywords: Electron Irradiation, Nanometer Sized-Structures, Silicon, Surface, Transmission Electron Microscopy (TEM), UHV
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Defect Control in Nitrogen Doped Czochralski Silicon Crystals
Authors: Atsushi Ikari, Katsuhiko Nakai, Y. Tachikawa, H. Deai, Y. Hideki, Yasumitsu Ohta, Naoya Masahashi, S. Hayashi, T. Hoshino, Wataru Ohashi
Keywords: Crystal Originated Particles (COP), Czochralski, Gate-Oxide Integrity, Grown-in Defects, Nitrogen, Oxygen Precipitates, Silicon, Transmission Electron Microscopy (TEM)
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Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers
Authors: A. Karoui, F.S. Karoui, De Ren Yang, George A. Rozgonyi
Keywords: Clusters, Complex, Denuded Zones, Etching, FTIR, Interstitials, Lo-Hi, Nitrogen, Nomarski, Nucleation, OPP, Oxide, Oxygen, Oxynitride, Precipitates, Silicon, SIMS, Size Distribution, Transmission Electron Microscopy (TEM), Vacancy, VN2, Void
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Measurement of the Normalized Recombination Strength of Dislocations in Multicrystalline Silicon Solar Cells
Authors: Markus Rinio, Stefan Peters, Martina Werner, Alexander Lawerenz, Hans Joachim Möller
Keywords: Dislocation, Dislocation Strength, LBIC, Recombination, RTP, Silicon, Solar Cells, Transmission Electron Microscopy (TEM)
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SiOx Formation Process between YSZ and Si Substrate in YSZ/Si Thin Films by In-Situ TEM Analysis
Authors: Takanori Kiguchi, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani
Keywords: In Situ Observation, Crystallization, Diffusion, Oxidation, Silicon, SiOx, Transmission Electron Microscopy (TEM), YSZ
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Dislocation-Gold Interactions in FZ and CZ Silicon: The Role of Self-Interstitials
Authors: Bernard Pichaud, G. Mariani, W.J. Taylor, W.S. Yang
Keywords: Dislocation, Gold, Sii Self Interstitials, Silicon, Spreading Resistance, Transmission Electron Microscopy (TEM)
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Defects Below Mask Edges in Silicon Induced by Amorphizing Implantations
Authors: Hans Cerva
Keywords: Arsenic, BF2+, Crystal Defect, Dislocation, Implantation, Mask Edge, Phosphorus, Recrystallization, Secondary Defects, Silicon, Transmission Electron Microscopy (TEM), ULSI, VLSI
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