Silicon and X-Ray Photoelectron Spectroscopy (XPS)

Papers by keyword «Silicon» and «X-Ray Photoelectron Spectroscopy (XPS)»

The Optimization of the Cleaning to Remove Residual Bonds of Si-C and Si-F after Fluorocarbon Plasma Etch on the Silicon Surface
Authors: Y.B. Kim, Mikhail R. Baklanov, Thierry Conard, Serge Vanhaelemeersch, W. Vandervorst
Keywords: Fluorocarbon, Plasma Etch, Polymer, Post Cleaning, Residues, Si-C, Si-F, Silicon, X-Ray Photoelectron Spectroscopy (XPS)
In-Situ Investigation of Carbon Reduction at Ni/4H-SiC Interface Using a Silicon Interlayer
Authors: W.Y. Lee, K.S. Teng, S.P. Wilks
Keywords: 4H SiC, Low Energy Electron Diffraction, Nickel Ni, Ni-SiC, Ni-Silicides, Ni-Si-SiC, Silicon, X-Ray Photoelectron Spectroscopy (XPS)
Interpreting of XPS C1s Binding Energies in Silicon Containing Polymers and Nanoparticles
Authors: E.A. Hoffmann, Lj. Korugić-Karasz
Keywords: AM1, Binding Energy, Nanoparticle, Polymer, Silicon, X-Ray Photoelectron Spectroscopy (XPS)