Papers by keyword «Sputtering»
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6H-SiC Schottky Diode Edge Terminated Using Amorphous SiC by Sputtering Method
Authors: K. Matsumoto, Y. Chen, J. Kuzmik, Shigehiro Nishino
Keywords: Edge Termination, Reactive Ion Etching, Schottky, Sputtering
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Reactive UHV Sputtering and Structural Characterization of Epitaxial AlN/6H-SiC(0001) Thin Films
Authors: Sukkaneste Tungasmita, J. Birch, L. Hultman, Erik Janzén, J.-E. Sundgren
Keywords: 6H-SiC, AlN, High Resolution Transmission Electron Microscopy (HRTEM), SIMS, Sputtering, Thin Film, X-Ray Diffraction (XRD)
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Metastable Defects in Oxide Thin Films
Authors: Mamabu Komatsu, Tsuyoshi Ogino, Shunichi Hishita, K. Oyoshi, Naoki Ohashi, Hajime Haneda, Tadashi Takenaka
Keywords: Metastable Defects, SIMS, Sputtering, Zinc Oxide
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Low-Energy-Ion-Assisted Reactive Sputter Deposition of Epitaxial AlN Thin Films on 6H-SiC
Authors: Sukkaneste Tungasmita, P.O.Å. Persson, K. Järrendahl, L. Hultman, J. Birch
Keywords: 6H-SiC, AlN, Cathodoluminescence (CL), Epitaxial, Sputtering, Transmission Electron Microscopy (TEM), X-Ray Diffraction (XRD)
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Microstructure of Zinc Oxide Grown by rf Magnetron Sputtering: Aspect of Oxygen Vacancy
Authors: Tsuyoshi Ogino, Mamabu Komatsu, Isao Sakaguchi, Shunichi Hishita, Naoki Ohashi, Tadashi Takenaka, Kensuke Oki, Noriyuki Kuwano, Hajime Haneda
Keywords: Defect, Sputtering, ZnO
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Effect of Ti Coatings on Fatigue Behaviour of the Al 6061 / 20% SiCp Composite
Authors: R. Montanari, P. Gondi, A. Sili
Keywords: Al Alloy, Composite, Fatigue, Rotating Bending, SiC Particle, Sputtering, Ti Coating
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Novel Ni-TaC Nanocrystalline Cermets
Authors: A.L. Greer, J.R. Wilde
Keywords: Cermets, Devitrification, Hard Coating, Ideal Strength, Nanocrystals, Nanoindentation, Ni-TaC, Sputtering, Thin Film
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Poly-Crystallized SiGe Thin Films in a Low-Temperature Process
Authors: Takashi Noguchi
Keywords: Excimer Laser, Gate, Polycrystalline, SiGe, SOI, Sputtering, TFT, Vth
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Fabrication, Microstructure and Stress Effects in Sputtered TiNi Thin Films
Authors: D.S. Grummon
Keywords: Actuator, MEMS, Residual Stress, Shape Memory, Sputtering, Thin Film, TiNi
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Magnetic Phase and Microstructure of Fe-Zr Films Epitaxially Grown on MgO (001)
Authors: Pyung Woo Jang, Jae Yeol Kim
Keywords: Epitaxial Growth, Fe-Zr Film, Orthorhombic Deformation, Sputtering
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